Semiconductor device having lateral diode

ABSTRACT

A semiconductor device having a lateral diode includes a semiconductor layer, a first semiconductor region in the semiconductor layer, a contact region having an impurity concentration greater than that of the first semiconductor region, a second semiconductor region located in the semiconductor layer and separated from the contact region, a first electrode electrically connected through the contact region to the first semiconductor region, and a second electrode electrically connected to the second semiconductor region. The second semiconductor region includes a low impurity concentration portion, a high impurity concentration portion, and an extension portion. The second electrode forms an ohmic contact with the high impurity concentration portion. The extension portion has an impurity concentration greater than that of the low impurity concentration portion and extends in a thickness direction of the semiconductor layer.

CROSS REFERENCE TO RELATED APPLICATION

This application is based on and claims priority to Japanese PatentApplication No. 2010-175464 filed on Aug. 4, 2010 and No. 2011-118863filed on May 27, 2011, the contents of which are incorporated herein byreference.

FIELD OF THE INVENTION

The present invention relates to a semiconductor device having a lateraldiode.

BACKGROUND OF THE INVENTION

U.S. Pat. No. 5,982,015 corresponding to JP-A-11-233795 discloses alateral diode used as a freewheeling diode (FWD) connected in parallelto a semiconductor switching element such as an insulated gate bipolartransistor (IGBT). The anode of the lateral diode has both ohmic contactand Schottky contact so that the accumulation of holes can be reduced.Accordingly, the reverse recovery charge Qrr is reduced so that thereverse recovery capability can be improved. That is, the Schottkycontact reduces the electronic injection. Therefore, even when the holeinjection can be reduced without reducing the amount of current. Thus,the reverse recovery charge Qrr is reduced so that the reverse recoverycapability can be improved.

As described above, when the anode of the lateral diode has both ohmiccontact and Schottky contact, the reverse recovery charge Qrr is reducedso that the reverse recovery capability can be improved. However, theavalanche capability cannot be improved. Therefore, it is likely thatthe avalanche breakdown occurs during a high speed switching operation.

SUMMARY OF THE INVENTION

In view of the above, it is an object of the present invention toprovide a semiconductor device having a lateral diode with both improvedreverse recovery capability and improved avalanche capability.

According to an aspect of the present invention, a semiconductor devicehaving a lateral diode includes a semiconductor substrate including afirst conductivity-type semiconductor layer, a first conductivity-typefirst semiconductor region located in the semiconductor layer, a firstconductivity-type contact region having an impurity concentrationgreater than an impurity concentration of the first semiconductorregion, a second semiconductor region located in the semiconductor layerand separated from the contact region, a first electrode electricallyconnected through the contact region to the first semiconductor region,and a second electrode electrically connected to the secondsemiconductor region. One of the first semiconductor region and thesecond semiconductor region is a cathode region. The other of the firstsemiconductor region and the second semiconductor region is an anoderegion. One of the first electrode and the second electrode, which isconnected to the cathode region, is a cathode electrode of the lateraldiode. The other of the first electrode and the second electrode, whichis connected to the anode region, is an anode electrode of the lateraldiode. The second semiconductor region includes a low impurityconcentration portion, a high impurity concentration portion, and anextension portion. The low impurity concentration portion is in contactwith the high impurity concentration portion and has an impurityconcentration less than an impurity concentration of the high impurityconcentration portion. The second electrode forms an ohmic contact withthe high impurity concentration portion. The extension portion has animpurity concentration greater than the impurity concentration of thelow impurity concentration portion and extends in a thickness directionof the semiconductor layer.

According to another aspect of the present invention, a semiconductordevice having a lateral diode includes a semiconductor substrateincluding a supporting substrate, an insulation layer on the supportingsubstrate, and a first conductivity-type semiconductor layer on theinsulation layer, an isolation structure extending from a surface of thesemiconductor layer to the insulation layer, a first conductivity-typefirst semiconductor region located in the semiconductor layer isolatedby the isolation structure, a first conductivity-type contact regionhaving an impurity concentration greater than an impurity concentrationof the first semiconductor region, a first electrode electricallyconnected to the contact region, and a second semiconductor regionlocated in the first semiconductor region and separated from the contactregion. The second semiconductor region includes a low impurityconcentration portion and a high impurity concentration portion. The lowimpurity concentration portion is in contact with the high impurityconcentration portion and has an impurity concentration less than animpurity concentration of the high impurity concentration portion. Thesemiconductor device further includes a second electrode electricallyconnected to the low impurity concentration portion and the highimpurity concentration portion. The second electrode forms an ohmiccontact with the high impurity concentration portion. The semiconductordevice further includes a second conductivity-type extension portionlocated in the semiconductor layer and having an impurity concentrationgreater than the impurity concentration of the low impurityconcentration portion. The extension portion extends in a thicknessdirection of the semiconductor layer and is located further away fromthe contact region than the low impurity concentration portion and thehigh impurity concentration portion.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other objects, features, and advantages will become moreapparent from the following description and drawings in which likereference numerals depict like elements. In the drawings:

FIG. 1 is a diagram illustrating a cross-sectional view, taken along theline I-I in FIG. 2B, of a semiconductor device having a lateral diodeaccording to a first embodiment of the present invention;

FIG. 2A is a diagram illustrating a top view of one cell of the lateraldiode of FIG. 1, and FIG. 2B is an enlarged view taken within a region Rin FIG. 2A;

FIG. 3 is a diagram illustrating changes in an anode current and ananode-cathode voltage during switching operation in the first-embodimentlateral diode and a prior-art lateral diode;

FIGS. 4A-4L are diagrams illustrating an electric field intensitydistribution on an anode-side observed at times (1)-(6) in FIG. 3;

FIG. 5 is a diagram illustrating a change in an electric field intensityon the near side of a low impurity concentration portion from a cathodeat the times (1)-(6);

FIGS. 6A-6C are diagrams illustrating manufacturing processes of thesemiconductor device according to the first embodiment;

FIGS. 7A-7C are diagrams illustrating manufacturing processes followingthe manufacturing processes of FIGS. 6A-6C;

FIGS. 8A-8C are diagrams illustrating manufacturing processes followingthe manufacturing processes of FIGS. 7A-7C;

FIG. 9 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according to a secondembodiment of the present invention;

FIG. 10 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according to a thirdembodiment of the present invention;

FIG. 11 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according to a fourthembodiment of the present invention;

FIG. 12 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according to a fifthembodiment of the present invention;

FIG. 13 is a diagram illustrating changes in the anode current and theanode-cathode voltage during switching operation in the second throughfifth-embodiment lateral diodes and the prior-art lateral diode;

FIG. 14 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according to a sixthembodiment of the present invention;

FIG. 15 is diagram illustrating an enlarged partial top view of thesemiconductor device of FIG. 14;

FIG. 16 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according to a seventhembodiment of the present invention;

FIG. 17 is diagram illustrating an enlarged partial top view of thesemiconductor device of FIG. 16;

FIG. 18 is a diagram illustrating changes in the anode current and theanode-cathode voltage during switching operation in the sixth andseventh-embodiment lateral diodes and the prior-art lateral diode;

FIG. 19 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according to an eighthembodiment of the present invention;

FIG. 20 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according to a ninthembodiment of the present invention;

FIG. 21 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according to a tenthembodiment of the present invention;

FIG. 22 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according to an eleventhembodiment of the present invention;

FIG. 23 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according to a twelfthembodiment of the present invention;

FIG. 24 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according to a thirteenthembodiment of the present invention;

FIG. 25 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according to a fourteenthembodiment of the present invention;

FIG. 26 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according to a fifteenthembodiment of the present invention;

FIGS. 27A-27F are diagrams illustrating a semiconductor device in whichan anode extension region is separated from a trench isolation structure1 d by 0 μm, 1.5 μm, 3.5 μm, 5.75 μm, 9.5 μm, and 14.5 μm, respectively;

FIG. 28 is a diagram illustrating a result of an experiment conducted tomeasure a relationship between a reverse recovery charge and theseparation distance shown in FIGS. 27A-27F;

FIG. 29 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according to a modificationof the present invention;

FIG. 30 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according to anothermodification of the present invention;

FIG. 31 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according to anothermodification of the present invention;

FIG. 32 is a diagram illustrating an enlarged partial top view of asemiconductor device according to another modification of the presentinvention;

FIG. 33A is a diagram taken along the line XXXIIIA-XXXIIIA in FIG. 32,and FIG. 33B is a diagram taken along the line XXXIIIB-XXXIIIB in FIG.32;

FIG. 34 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according to anothermodification of the present invention;

FIG. 35 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according to anothermodification of the present invention;

FIG. 36 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according to anothermodification of the present invention; and

FIG. 37 is a diagram illustrating a cross-sectional view of asemiconductor device according to another modification of the presentinvention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First Embodiment

A semiconductor device having a lateral diode according to a firstembodiment of the present invention is described below with reference toFIGS. 1, and 2A and 2B. FIG. 1 is a cross-sectional view of thesemiconductor device taken along the line I-I in FIG. 2B. FIG. 2A is atop view of one cell of the lateral diode of the semiconductor device.FIG. 2B is an enlarged view taken within a region R in FIG. 2A.

According to the first embodiment, as shown in FIG. 1, the lateral diodeis formed by using a semiconductor substrate 1 as a SOI substrate. Thesemiconductor substrate 1 includes a supporting substrate 1 a, a buriedoxide (BOX) layer 1 b on the supporting substrate 1 a, and an activelayer 1 c on the BOX layer 1 b. For example, the supporting substrate 1a can be a silicon substrate, and the active layer 1 c can be a siliconlayer. According to the first embodiment, the active layer 1 c serves asan n⁻-type cathode layer 2. Each part of the lateral diode is formed inthe cathode layer 2.

The thickness of the BOX layer 1 b, and the thickness and the impurityconcentration of the active layer 1 c (i.e., the cathode layer 2) arenot limited to specific values and can vary depending on the intendeduse of the semiconductor device. For example, in order to achieve highbreakdown voltage, it is preferable that the thickness of the BOX layer1 b be 4 micrometers (μm) or more. For example, the active layer 1 c canhave an n-type impurity concentration of 7.0×10¹⁴ cm⁻³. A trenchisolation structure 1 d is formed in the semiconductor substrate 1 tosurround the lateral diode so that the lateral diode can be isolatedfrom other elements. For example, the trench isolation structure 1 d hasa trench extending from a surface of the active layer 1 c to the BOXlayer 1 b. The trench is filled with polysilicon through an insulationlayer.

A LOCOS oxide layer 3 is formed on a surface of the cathode layer 2. Theparts of the lateral diode are insulated from each other by the LOCOSoxide layer 3. An n⁺-type cathode contact region 4 is formed in thesurface portion of the cathode layer 2 and exposed outside the LOCOSoxide layer 3. The cathode contact region 4 has a longitudinal directionparallel to a surface of the semiconductor substrate 1. The cathodecontact region 4 is surrounded by an n-type buffer layer 5. The bufferlayer 5 has an impurity concentration greater than that of the cathodelayer 2. For example, the cathode contact region 4 can have an n-typeimpurity concentration of 1.0×10²⁰cm⁻³ and a depth of 0.2 μm. Forexample, the buffer layer 5 can have an n-type impurity concentration of3.0×10¹⁶cm⁻³ and a depth of 5 μm.

A p-type anode region 6 is formed in the surface portion of the cathodelayer 2 and exposed outside the LOCOS oxide layer 3. The anode region 6is arranged circularly around the cathode contact region 4 so that thecathode contact region 4 can be surrounded by the anode region 6. Theanode region 6 has a p⁻-type low impurity concentration portion 7 and ap⁺-type high impurity concentration portion 8.

The low impurity concentration portion 7 is located closer to thecathode contact region 4 than the high impurity concentration portion 8.Further, a depth of the low impurity concentration portion 7 is greaterthan a depth of the high impurity concentration portion 8. According tothe first embodiment, as shown in FIG. 2A, the low impurityconcentration portion 7 has an ellipse shape when viewed from the top.Specifically, the low impurity concentration portion 7 has two straightparts extending in parallel to the cathode contact region 4 and twoarc-shaped parts connecting ends of the straight parts. The low impurityconcentration portion 7 has a p-type impurity concentration of1.0×10¹⁶cm⁻³ or less. For example, the low impurity concentrationportion 7 can have the p-type impurity concentration of 1.0×10¹⁶cm⁻³ anda thickness of 3.1 μm.

The high impurity concentration portion 8 is in contact with a surfaceof the low impurity concentration portion 7. According to the firstembodiment, a side surface of the high impurity concentration portion 8is covered with the low impurity concentration portion 7. As shown inFIG. 2A, the high impurity concentration portion 8 has a straight shapewhen viewed from the top. The high impurity concentration portion 8 islocated on each side of the cathode contact region 4. Thus, the totalnumber of the high impurity concentration portions 8 is two. Accordingto the first embodiment, the high impurity concentration portion 8 isformed in a surface portion of the low impurity concentration portion 7at a position furthest away from the cathode contact region 4. That is,the high impurity concentration portion 8 is located on the far side ofthe low impurity concentration portion 7 from the cathode contact region4. The high impurity concentration portion 8 has a p-type impurityconcentration of 1.0×10¹⁹cm⁻³ or more. For example, the high impurityconcentration portion 8 can have the p-type impurity concentration of1.0×10²⁰cm⁻³ and a thickness of 0.55 μm.

A p⁺-type anode extension portion 9 is formed in the semiconductorsubstrate 1 and extends at least in a depth direction of the activelayer 1 c. The anode extension portion 9 is located further away fromthe cathode contact region 4 than the low impurity concentration portion7 and the high impurity concentration portion 8 of the anode region 6.Specifically, the anode extension portion 9 is located outside the lowimpurity concentration portion 7 and the high impurity concentrationportion 8 with respect to the cathode contact region 4. Morespecifically, the anode extension portion 9 is located between thetrench isolation structure 1 d and the low impurity concentrationportion 7 and the high impurity concentration portion 8. According tothe first embodiment, the anode extension portion 9 has a first portion9 a and a second portion 9 b. The first portion 9 a is in contact with aside surface of the trench isolation structure 1 d. The second portion 9b connects the first portion 9 a to the high impurity concentrationportion 8. As shown in FIG. 2A, the anode extension portion 9 has astraight shape when viewed from the top. The anode extension portion 9is located on each side of the cathode contact region 4. Thus, the totalnumber of the anode extension regions 9 is two. For example, the anodeextension portion 9 can have a p-type impurity concentration of1.0×10²⁰cm⁻³. For example, the first portion 9 a can have the samethickness as the active layer 1 c and a width of 1 μm.

A cathode electrode 10 is formed on the surface of the cathode contactregion 4 and electrically connected to the cathode contact region 4. Ananode electrode 11 is formed on the surface of the anode region 6 andelectrically connected to the anode region 6. The cathode electrode 10forms ohmic contact with the cathode contact region 4. The cathodeelectrode 10 has the same straight shape as the cathode contact region 4and is formed almost all over the surface of the cathode contact region4. The anode electrode 11 has a straight shape and is located on eachside of the cathode electrode 10. The anode electrode 11 forms Schottkyor ohmic contact with the straight portion of the low impurityconcentration portion 7 of the anode region 6. Further, the anodeelectrode 11 forms ohmic contact with the high impurity concentrationportion 8 of the anode region 6. Thus, the anode electrode 11 isconnected to both the low impurity concentration portion 7 and the highimpurity concentration portion 8. According to the first embodiment, theanode electrode 11 is formed almost all over the straight portion of theanode region 6.

A resistor layer 12 is formed on the LOCOS oxide layer 3 between thecathode and the anode. For example, the resistor layer 12 can be made ofdoped polysilicon. The resistor layer 12 serves to maintain a uniformpotential gradient between the cathode and the anode. Specifically, asshown in FIG. 2A, the resistor layer 12 has a spiral shape and is woundaround the cathode electrode 10. The resistor layer 12 is electricallyconnected at one end to the cathode electrode 10 and at the other end tothe anode electrode 11. The potential of the resistor layer 12 graduallydecreases with the distance from the cathode electrode 10 due to avoltage drop caused by an internal resistance of the resistor layer 12.Thus, the potential gradient in the resistor layer 12 can be maintaineduniform. Accordingly, the potential gradient in the cathode layer 2,which is located below the resistor layer 12 across the LOCOS oxidelayer 3, can be maintained uniform. Thus, electric field concentrationresulting from non-uniform potential gradient is reduced so that abreakdown voltage can be improved. Further, impact ionization is reducedso that an increase in turn-off switching time can be reduced.

In addition to the lateral diode, a semiconductor switching element suchas a lateral IGBT is formed in the semiconductor substrate 1. Thelateral diode is connected in parallel to the semiconductor switchingelement and used as a freewheeling diode.

As described above, according to the lateral diode of the firstembodiment, while the anode electrode 11 forms Schottky or ohmic contactwith the straight portion of the low impurity concentration portion 7 ofthe anode region 6, the anode electrode 11 forms ohmic contact with thehigh impurity concentration portion 8 of the anode region 6. Since theanode electrode 11 is electrically connected to the low impurityconcentration portion 7, the amount of injected electrons becomes smallso that the amount of injected holes can be reduced without reducing theamount of current. Thus, the reverse recovery charge Qrr is reduced sothat the reverse recovery capability can be improved. Further, since theamount of injected holes is reduced, the lateral diode can operate fastwithout lifetime control.

Further, the anode extension portion 9 is located further away from thecathode contact region 4 than the low impurity concentration portion 7and the high impurity concentration portion 8 of the anode region 6. Insuch an approach, the avalanche capability of the lateral diode can beimproved. Specifically, the anode extension portion 9 has the firstportion 9 a extending in a vertical direction (i.e., thicknessdirection) of the semiconductor substrate 1. Thus, a depletion layerextends from the first portion 9 a in a lateral direction (i.e., planardirection), perpendicular to the vertical direction, of thesemiconductor substrate 1 to reduce electric field concentration.Therefore, the avalanche breakdown becomes less likely to occur so thatthe avalanche capability can be improved. Further, the anode extensionportion 9 has the first portion 9 a has the second portion 9 b forconnecting the first portion 9 a to the anode electrode 11 through thehigh impurity concentration portion 8. Thus, holes are efficiently drawnfrom the first portion 9 a to the anode electrode 11 through the secondportion 9 b and the high impurity concentration portion 8. Therefore,the lateral diode can perform fast switching operation so that recoveryloss can be reduced.

FIG. 3, FIGS. 4A-4L, and FIG. and FIG. 5 shows a result of a simulationconducted by the present inventors to evaluate the effect of the firstembodiment. FIG. 3 illustrates changes in an anode current Ia and ananode-cathode voltage Vak during a switching operation. In FIG. 3, abroken line represents a prior-art lateral diode having no anodeextension portion 9, and a solid line represents the first-embodimentlateral diode having the anode extension portion 9. FIGS. 4A-4Lillustrate the electric field intensity distribution on the anode-sideobserved at times (1)-(6) shown in FIG. 3. Specifically, FIGS. 4A, 4B,4C, 4G, 4H, and 4I illustrate the electric field intensity distributionon the anode-side of the prior-art lateral diode at times (1)-(6),respectively. In contrast, FIGS. 4D, 4E, 4F, 4J, 4K, and 4L illustratethe electric field intensity distribution on the anode-side of thefirst-embodiment lateral diode observed at the times (1)-(6),respectively. In FIGS. 4A-4L, the equipotential lines are spaced atintervals of 10 volts. FIG. 5 illustrates a change in the electric fieldintensity (EFI) on the near side (i.e., position Z in FIGS. 4A and 4D)of the low impurity concentration portion 7 from the cathode observed atthe times (1)-(6). In FIG. 5, a broken line represents the prior-artlateral diode, and a solid line represents the first-embodiment lateraldiode.

The recovery loss depends on the sum total of the amount of the anodecurrent Ia flowing from when the anode current Ia becomes negative towhen the anode current Ia becomes zero. In other words, the recoveryloss depends on an area of the region where the anode current Ia is zeroor less. The recovery loss increases with an increase in the area. Ascan be seen from FIG. 3, the amount of a reduction in the anode currentIa is smaller in the first-embodiment lateral diode than in theprior-art lateral diode. Accordingly, the area of the region where theanode current Ia is zero or less is smaller in the first-embodimentlateral diode than in the prior-art lateral diode. Therefore, therecovery loss becomes smaller in the first-embodiment lateral diode thanin the prior-art lateral diode.

Further, since the prior-art lateral diode does not have the anodeextension portion 9, the low impurity concentration portion 7 and thehigh impurity concentration portion 8 are surrounded by theequipotential lines, as shown in FIGS. 4A and 4B. Then, theequipotential lines extend below with time, as shown in FIG. 4C. Then,the equipotential lines reach the BOX layer 1 b and extend in thelateral direction, as shown in FIGS. 4G, 4H, and 4I.

In contrast, since the first-embodiment lateral diode has the anodeextension portion 9, the depletion layer can extend from the anodeextension portion 9 so that depletion can be accelerated in the lateraldirection. Thus, as shown in FIGS. 4D, 4E, 4F, 4J, 4K, and 4L, not onlythe low impurity concentration portion 7 and the high impurityconcentration portion 8, but also the anode extension portion 9 aresurrounded by the equipotential lines. In this way, the equipotentiallines can extend in the lateral direction from the initial time (1).

Therefore, according to the first embodiment, local peak of the electricfield intensity at an electric field concentration point is reduced.Thus, the avalanche breakdown is less likely to occur so that theavalanche capability can be improved.

The above effect of the first embodiment is clear from FIG. 5. As shownin FIG. 5, the electric field intensity on the near side of the lowimpurity concentration portion 7 from the cathode is smaller in thefirst-embodiment lateral diode than in the prior-art lateral diode. Theabove effect of the first embodiment is also clear from FIG. 3. As shownin FIG. 3, the anode current Ia has two local minimum values duringreverse recovery operation. The second local minimum value depends onthe avalanche capability. That is, as the second local minimum value issmaller, the avalanche capability is smaller. In FIG. 3, a point Xindicates the second local minimum value in the first-embodiment lateraldiode, and a point Y indicates the second local minimum value in theprior-art lateral diode. As can be seen by comparing the point X and thepoint Y, the second local minimum value is greater in thefirst-embodiment lateral diode than in the prior-art lateral diode.Therefore, the avalanche capability is greater in the first-embodimentlateral diode than in the prior-art lateral diode.

As described above, according to the first embodiment, the anodeelectrode 11 is electrically connected to the low impurity concentrationportion 7 and the high impurity concentration portion 8, and the anodeextension portion 9 is located further away from the cathode electrode10 than the low impurity concentration portion 7 and the high impurityconcentration portion 8. In such an approach, the amount of injectedholes is reduced so that the reverse recovery capability can beimproved, and also the avalanche capability can be improved.

By the way, in the prior-art lateral diode, the high impurityconcentration portion 8 is surrounded by the low impurity concentrationportion 7 to reduce hole injection from the high impurity concentrationportion 8. Therefore, it is not obvious to those skilled in the art toadd the anode extension portion 9 which can increase the hole injection.

The present inventors have conducted simulations and found out thefollowing facts. Under a forward bias condition where carrier conductiondepends on diffusion, an injection phenomenon depends on the p⁻/p⁺ anodestructure in the anode region. That is, the anode extension portion 9,which is located in the back of the low impurity concentration portion7, has no contribution to carrier conduction.

On the other hand, under a recovery condition where carrier conductiondepends on drift, the anode extension portion 9 acts as a p⁺ anode layerof one-dimensional diode having a p⁺-type right edge surface. At aninitial stage of recovery, holes stored in a region from near the trenchto below the anode are rapidly emitted into the anode extension portion9 so that depletion can occur. Thus, depletion in the n⁻-type driftlayer (i.e., cathode layer 2) occurs rapidly, and the stored holes areemitted to the low impurity concentration portion 7. As a result, anincrease in the electric field is reduced so that dynamic avalanche canbe prevented.

Based on the above facts, the present inventors have conducted anexperiment to evaluate the structure in which the anode extensionportion 9 is located further away from the cathode electrode 10 than thelow impurity concentration portion 7 and the high impurity concentrationportion 8. A result of the experiment indicates that the anode extensionportion 9 does not affect the hole injection. Since the anode extensionportion 9 does not affect the hole injection, an increase in the reverserecovery charge Qrr and a reduction in the reverse recovery capabilitycan be prevented.

Next, a method of manufacturing the semiconductor device having thelateral diode according to the first embodiment is described below withreference to FIGS. 6A-6C, 7A-7C, and 8A-8C. In the drawings, an IGBT isformed adjacent to the lateral diode.

Firstly, as shown in FIG. 6A, the semiconductor substrate 1 is prepared.For example, a silicon substrate for the active layer 1 c is bonded onthe supporting substrate 1 a through the BOX layer 1 b, and then thesilicon substrate is thinned to a predetermined thickness correspondingto the active layer 1 c. In this way, the semiconductor substrate 1 canbe prepared.

Then, as shown in FIG. 6B, a cap layer 20 for ion injection is formed onthe surface of the active layer 1 c, and a mask (not shown) having anopening at a position corresponding to the second portion 9 b to beformed is placed on the cap layer 20. Then, p-type impurities are dopedthrough the mask into the active layer 1 c by ion implantation to formthe second portion 9 b. Then, the mask and the cap layer 20 are removed.

Then, as shown in FIG. 6C, a mask (not shown) having an opening at aposition corresponding to the trench isolation structure 1 d to beformed is formed on the active layer 1 c. Then, a trench is etched inthe active layer 1 c by using the mask. Then, after the mask is removed,a cap layer 21 is formed on the active layer 1 c and inside the trench.

Then, as shown in FIG. 7A, a mask having an opening at a positioncorresponding to the trench isolation structure 1 d to be formed isplaced on the cap layer 21, and p-type impurities are doped through themask, for example, by oblique ion implantation, to form the firstportion 9 a. Then, the mask and the cap layer 21 are removed.

Then, as shown in FIG. 7B, a thermal oxidation layer 22 is formed bythermal oxidation on the active layer 1 c and the inside the trench.Then, a polysilicon layer 23 is formed on the thermal oxidation layer 22to fill the trench. Then, for example, an etch-back process is performedso that the polysilicon layer 23 can remain only inside the trench.Thus, the trench isolation structure 1 d.

As shown in FIG. 7C, an n-type diffusion layer is formed at apredetermined position in the active layer 1 c. According to the firstembodiment, the diffusion layer includes the n-type buffer layer 5, ann-type buffer layer 31, and an n-type burrier layer 32. The buffer layer5 is located in a diode area, where the lateral diode is formed. Thebuffer layer 31 and the burrier layer 32 are located in an IGBT area,where the IGBT is formed. Then, the LOCOS oxide layer 3 is formed by awell-known LOCOS oxidation process.

Then, as shown in FIG. 8A, a doped polysilicon layer is formed on thesurface of the semiconductor substrate 1, after gate oxidation isperformed. Then, the resistor layer 12 is formed by patterning the dopedpolysilicon layer in the diode area. Likewise, a resistor layer 33 and agate electrode 34 are formed by patterning the doped polysilicon layerin the IGBT area.

Then, as shown in FIG. 8B, a process of forming a mask and a process ofperforming ion implantation through the mask are repeatedly performed toform a diffusion layer. Thus, the cathode contact region 4, the lowimpurity concentration portion 7, and the high impurity concentrationportion 8 are formed in the diode area, and a p-type contact layer 35, ap-type body layer 36, a p⁺-type collector region 37, and an n⁺-typeemitter region 38 are formed in the IGBT area.

Then, an interlayer dielectric film (not shown) is formed, and a contacthole is formed in the interlayer dielectric film. Then, a conductorlayer is formed on the interlayer dielectric film to fill the contacthole. Then, as shown in FIG. 8C, the cathode electrode 10 and the anodeelectrode 11 are formed by patterning the conductor layer in the diodearea. Likewise, an emitter electrode 39 and a collector electrode 39 areformed by patterning the conductor layer in the IGBT area.

In this way, the lateral diode and the lateral IGBT are formed in thesame semiconductor substrate 1. Another type of semiconductor switchingelement such as a MOSFET can be formed in the same semiconductorsubstrate 1 as the lateral diode. However, when the lateral diode iscombined with the MOSFET, the anode current Ia has three local minimumvalues during reverse recovery operation. Therefore, the recovery lossbecomes larger when the lateral diode is combined with the MOSFET thanwhen the lateral diode is combined with the IGBT.

Second Embodiment

A second embodiment of the present invention is described below withreference to FIG. 9. A difference between the first and secondembodiments is the structure of the anode extension portion 9.

FIG. 9 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according the secondembodiment. As shown in FIG. 9, according to the second embodiment, thethickness of the first portion 9 a of the anode extension portion 9 isless than the active layer 1 c. Specifically, the first portion 9 aextends from the surface of the active layer 1 s and is terminatedinside the active layer 1 c without reaching the BOX layer 1 b. Thus,about an upper half of the side surface of the trench isolationstructure 1 d is covered with the first portion 9 a, but about a lowerhalf of the side surface of the trench isolation structure 1 d is notcovered with the first portion 9 a. About the lower half of the trenchisolation structure 1 d is in contact with the cathode layer 2.

Even in such a structure as shown in FIG. 9, the depletion layer canextend from the anode extension portion 9 including the first portion 9a and the second portion 9 b, so that depletion can be accelerated inthe lateral direction. Since the first portion 9 a does not reach theBOX layer 1 b, the depletion layer is less likely to extend to a lowerportion of the active layer 1 c. However, almost the same affect as thefirst embodiment can be obtained.

The semiconductor device according to the second embodiment can bemanufactured by almost the same method as the semiconductor deviceaccording to the first embodiment. However, when the oblique ionimplantation of p-type impurities is performed to form the first portion9 a, an angle of the oblique ion implantation needs to be adjusted sothat the thickness of the first portion 9 a can be less than thethickness of the active layer 1 c.

Third Embodiment

A third embodiment of the present invention is described below withreference to FIG. 10. A difference between the first and thirdembodiments is the structure of the anode extension portion 9.

FIG. 10 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according the thirdembodiment. As shown in FIG. 10, according to the third embodiment, thethickness of the first portion 9 a of the anode extension portion 9 isless than the active layer 1 c. Specifically, like the secondembodiment, the first portion 9 a extends from the surface of the activelayer 1 c and is terminated inside the active layer 1 c without reachingthe BOX layer 1 b.

Further, according to the third embodiment, the anode extension portion9 has no second portion 9 b. Therefore, the first portion 9 a isseparated from the anode region 6.

Even in such a structure as shown in FIG. 10, the depletion layer canextend from the anode extension portion 9 including the first portion 9a, so that depletion can be accelerated in the lateral direction. Sincethe anode extension portion 9 has no second portion 9 b, holes cannot bedrawn by using a path passing the first portion 9 a, the second portion9 b, the high impurity concentration portion 8, and the anode electrode11. Therefore, from the standpoint of hole drawing efficiency, it ispreferable that the anode extension portion 9 have the second portion 9b.

The semiconductor device according to the third embodiment can bemanufactured by almost the same method as the semiconductor deviceaccording to the second embodiment. However, since the anode extensionportion 9 has no second portion 9 b, there is no need to perform theprocess of forming the second portion 9 b.

Fourth Embodiment

A fourth embodiment of the present invention is described below withreference to FIG. 11. A difference between the first and fourthembodiments is the structure of the anode extension portion 9.

FIG. 11 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according the fourthembodiment. As shown in FIG. 11, according to the fourth embodiment, thethickness of the first portion 9 a of the anode extension portion 9 isless than the active layer 1 c. Specifically, the first portion 9 aextends from the BOX layer 1 b on the bottom of the active layer 1 c andis terminated inside the active layer 1 c. Thus, about the lower half ofthe side surface of the trench isolation structure 1 d is covered withthe first portion 9 a, but about the upper half of the side surface ofthe trench isolation structure 1 d is not covered with the first portion9 a. About the upper half of the trench isolation structure 1 d is incontact with the cathode layer 2.

Even in such a structure as shown in FIG. 11, the depletion layer canextend from the anode extension portion 9 including the first portion 9a and the second portion 9 b, so that depletion can be accelerated inthe lateral direction. Since the first portion 9 a does not reach thesurface of the active layer 1 c, the depletion layer is less likely toextend to an upper portion of the active layer 1 c. However, almost thesame affect as the first embodiment can be obtained.

The semiconductor device according to the fourth embodiment can bemanufactured by almost the same method as the semiconductor deviceaccording to the first embodiment. However, since the first portion 9 aneeds to be formed only in a deep position in the active layer 1 c, thefirst portion 9 a is formed by a method other than the oblique ionimplantation. For example, p-type impurities are implanted into asurface of the silicon substrate for the active layer 1 c, and thenbonding the surface of the silicon substrate to the supporting substrateis through the BOX layer 1 b. Thus, the first portion 9 a is formed onlyin a deep position in the active layer 1 c. For another example, beforethe trench isolation structure 1 d is formed in the semiconductorsubstrate 1, p-type impurities are implanted into the semiconductorsubstrate 1 with high energy.

Fifth Embodiment

A fifth embodiment of the present invention is described below withreference to FIG. 12. A difference between the first and fifthembodiments is the structure of the anode extension portion 9.

FIG. 12 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according the fifthembodiment. As shown in FIG. 12, according to the fifth embodiment, thethickness of the first portion 9 a of the anode extension portion 9 isless than the active layer 1 c. Specifically, like the fourthembodiment, the first portion 9 a extends from the BOX layer 1 b on thebottom of the active layer 1 c and is terminated inside the active layer1 c. Further, according to the fifth embodiment, the anode extensionportion 9 has no second portion 9 b. Therefore, the first portion 9 a isseparated from the anode region 6.

Even in such a structure as shown in FIG. 12, the depletion layer canextend from the anode extension portion 9 including the first portion 9a, so that depletion can be accelerated in the lateral direction. Sincethe anode extension portion 9 has no second portion 9 b, holes cannot bedrawn by using a path passing the first portion 9 a, the second portion9 b, the high impurity concentration portion 8, and the anode electrode11. Therefore, from the standpoint of hole drawing efficiency, it ispreferable that the anode extension portion 9 have the second portion 9b.

The semiconductor device according to the fifth embodiment can bemanufactured by almost the same method as the semiconductor deviceaccording to the fourth embodiment. However, since the anode extensionportion 9 has no second portion 9 b, there is no need to perform theprocess of forming the second portion 9 b.

(Effect of the Second Through Fifth Embodiments)

FIG. 13 illustrates changes in the anode current Ia and theanode-cathode voltage Vak during switching operation in thesecond-embodiment lateral diode, the third-embodiment lateral diode, thefourth-embodiment lateral diode, the fifth-embodiment lateral diode, andthe prior-art lateral diode having no anode extension portion 9.

As can be seen from FIG. 13, the recovery loss in the lateral diode ofeach of the second through fifth embodiments is smaller than that of theprior-art lateral diode.

Sixth Embodiment

A sixth embodiment of the present invention is described below withreference to FIGS. 14 and 15. A difference between the first and sixthembodiments is the structure of the high impurity concentration portion8.

FIG. 14 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according the sixthembodiment. FIG. 15 is diagram corresponding to FIG. 2B and illustratingan enlarged partial top view of the lateral diode of FIG. 14.

According to the first embodiment, the high impurity concentrationportion 8 is located on the far side of the low impurity concentrationportion 7 from the cathode contact region 4. In contrast, as shown inFIG. 15, according to the sixth embodiment, the high impurityconcentration portion 8 is located in the center of the low impurityconcentration portion 7. Specifically, a width direction of the lowimpurity concentration portion 7 is perpendicular to the longitudinaldirection of the cathode contact region 4, and the high impurityconcentration portion 8 is located in the center of the low impurityconcentration portion 7 in the width direction of the low impurityconcentration portion 7.

Basically, the high impurity concentration portion 8 has a straightshape. Specifically, as shown in FIG. 15, the high impurityconcentration portion 8 has a straight portion and projections extendingperpendicularly from the straight portion and connected to the secondportion 9 b. For example, the projections can be arranged at regularintervals.

As described above, according to the sixth embodiment, the straightportion of the high impurity concentration portion 8 is located in thecenter of the low impurity concentration portion 7, and the projectionsof the high impurity concentration portion 8 extend from the straightportion and are connected to the second portion 9 b. In such anapproach, the same effect as the first embodiment can be obtained.

Seventh Embodiment

A seventh embodiment of the present invention is described below withreference to FIGS. 16 and 17. A difference between the first and seventhembodiments is the structure of the high impurity concentration portion8.

FIG. 16 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according the seventhembodiment. FIG. 17 is diagram corresponding to FIG. 2B and illustratingan enlarged partial top view of the lateral diode of FIG. 16.

Like the first embodiment, according to the seventh embodiment, the highimpurity concentration portion 8 is located on the far side of the lowimpurity concentration portion 7 from the cathode contact region 4.Unlike the first embodiment, the high impurity concentration portion 8is divided into multiple portions. The divided portions of the highimpurity concentration portion 8 are arranged at regular intervals andconnected to the second portion 9 b. Further, the divided portions ofthe high impurity concentration portion 8 are electrically connected tothe anode electrode 11.

As described above, according to the seventh embodiment, the highimpurity concentration portion 8 is divided into multiple portions thatare arranged at regular intervals and connected to the second portion 9b. In such an approach, the same effect as the first embodiment can beobtained.

(Effect of the Sixth and Seventh Embodiments)

FIG. 18 illustrates changes in the anode current Ia and theanode-cathode voltage Vak during switching operation in thesixth-embodiment lateral diode and the seventh-embodiment lateral diode.

As can be seen from FIG. 3 and FIG. 18, the recovery loss in the lateraldiode of each of the sixth and seventh embodiments is smaller than thatof the prior-art lateral diode. Further, FIG. 18 shows that the recoveryloss in the sixth-embodiment lateral diode is smaller than the recoveryloss in the seventh-embodiment lateral diode. Specifically, in thesixth-embodiment lateral diode, the reverse recovery charge Qrr is 96.8nC, and a reverse recovery current Irr is 0.56 A. In contrast, in theseventh-embodiment lateral diode, the reverse recovery charge Qrr is114.8 nc, and a reverse recovery current Irr is 0.75 A.

Eighth Embodiment

An eighth embodiment of the present invention is described below withreference to FIG. 19. A difference between the first and seventhembodiments is the structure of the semiconductor substrate 1.

According to the first embodiment, the semiconductor substrate 1 is aSOI substrate. However, the semiconductor substrate 1 is not limited toa SOI substrate. FIG. 19 is a diagram illustrating a cross-sectionalview of a semiconductor device having a lateral diode according theeighth embodiment. As shown in FIG. 19, according to the eighthembodiment, the semiconductor substrate 1 is an epitaxial wafer.Specifically, the semiconductor substrate 1 includes a silicon substrate1 e and an epitaxial layer 1 f, as a semiconductor layer, grown on asurface of the silicon substrate 1 e. The silicon substrate 1 e is ann-type or a p-type substrate and has a low impurity concentration of,for example, 1.0×10¹³cm⁻³. The epitaxial layer if is an n⁻-type impuritylayer and has an n-type low impurity concentration of, for example,7.0×10¹⁴cm⁻³. The trench isolation structure 1 d is formed in thesemiconductor substrate 1. The trench isolation structure 1 d includes atrench extending from a surface of the epitaxial layer 1 f to thesilicon substrate 1 e. The trench is filled with an insulation layer sothat element isolation can be achieved.

As described above, according to the eighth embodiment, thesemiconductor substrate 1 is an epitaxial wafer. When an epitaxial waferis used as the semiconductor substrate 1, the depletion layer can extendtoward the silicon substrate 1 e. However, within the epitaxial layer 1f, the depletion layer extends almost equally in the lateral directionof the semiconductor substrate 1. Therefore, the avalanche capabilitycan be improved. Thus, the same effect as the first embodiment can beobtained.

Ninth Embodiment

A ninth embodiment of the present invention is described below withreference to FIG. 20. The ninth embodiment is similar to the eighthembodiment. A difference between the eighth and ninth embodiments is asfollows.

According to the ninth embodiment, like the eighth embodiment, thesemiconductor substrate 1 is an epitaxial wafer. Unlike the eighthembodiment, the trench isolation structure 1 d is not formed in thesemiconductor substrate 1 so that only the anode extension portion 9 canextend from the surface of the epitaxial layer 1 f to the siliconsubstrate 1 e. Although the semiconductor substrate 1 has no trenchisolation structure 1 d, the depletion layer extends almost equally inthe lateral direction of the semiconductor substrate 1 within theepitaxial layer 1 f. Thus, the same effect as the first embodiment canbe obtained.

The anode extension portion 9 can be formed by performing ionimplantation of p-type impurities into the epitaxial layer 1 f.Alternatively, the anode extension portion 9 can be formed by forming atrench in the epitaxial layer 1 f and filling the trench with a p⁺-typelayer by epitaxial growth.

Tenth Embodiment

A tenth embodiment of the present invention is described below withreference to FIG. 21. A difference between the first and tenthembodiments is the structure of the semiconductor substrate 1.

FIG. 21 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according the tenthembodiment. As shown in FIG. 20, according to the tenth embodiment, thesemiconductor substrate 1 is a bulk wafer. Specifically, thesemiconductor substrate 1 includes only a silicon substrate 1 g as asemiconductor layer. The silicon substrate 1 g is an n⁻-type siliconsubstrate and has a n-type impurity concentration of, for example,7.0×10¹⁴cm⁻³. The trench isolation structure 1 d is formed in thesemiconductor substrate 1. The trench isolation structure 1 d extendsfrom a surface of the silicon substrate 1 g to a depth greater than adepth of the anode extension portion 9 so that element isolation can beachieved.

As described above, according to the tenth embodiment, the semiconductorsubstrate 1 is a bulk wafer. When a bulk wafer is used as thesemiconductor substrate 1, the depletion layer can extend below theanode extension portion 9. However, at the depth of the anode extensionportion 9, the depletion layer extends almost equally in the lateraldirection of the semiconductor substrate 1. Therefore, the avalanchecapability can be improved. Thus, the same effect as the firstembodiment can be obtained.

The silicon substrate 1 g can be thinned by polishing a back surface ofthe silicon substrate 1 g until the anode extension portion 9 is exposedto the back surface of the silicon substrate 1 g. In such an approach,the depletion layer does not extend below the anode extension portion 9.Therefore, the avalanche capability can be further improved.

Eleventh Embodiment

An eleventh embodiment of the present invention is described below withreference to FIG. 22. The eleventh embodiment is similar to the tenthembodiment. A difference between the tenth and eleventh embodiments isthe structure of the anode extension portion 9.

FIG. 22 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according the eleventhembodiment. As shown in FIG. 22, according to the eleventh embodiment,like the tenth embodiment, the semiconductor substrate 1 is a bulk waferand includes the silicon substrate 1 g. Unlike the tenth embodiment, theanode extension portion 9 extends to below the trench isolationstructure 1 d so that the bottom of the trench isolation structure 1 dcan be covered with the anode extension portion 9. Even in such astructure as shown in FIG. 22, the same effect as the tenth embodimentcan be obtained.

Twelfth Embodiment

A twelfth embodiment of the present invention is described below withreference to FIG. 23. The twelfth embodiment is similar to the tenthembodiment. A difference between the tenth and twelfth embodiments is asfollows.

FIG. 23 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according the twelfthembodiment. As shown in FIG. 23, according to the twelfth embodiment,like the tenth embodiment, the semiconductor substrate 1 is a bulk waferand includes only the silicon substrate 1 g. Unlike the tenthembodiment, the trench isolation structure 1 d is not formed in thesemiconductor substrate 1 so that only the anode extension portion 9 canextend from the surface of the silicon substrate 1 g to a predetermineddepth of the silicon substrate 1 g. Although the semiconductor substrate1 has no trench isolation structure 1 d, the depletion layer extendsalmost equally in the lateral direction of the semiconductor substrate 1at the depth of the anode extension portion 9. Thus, the same effect asthe first embodiment can be obtained.

The anode extension portion 9 can be formed by performing ionimplantation of p-type impurities into the silicon substrate 1 g.Alternatively, the anode extension portion 9 can be formed by forming atrench in the silicon substrate 1 g and filling the trench with ap⁺-type layer by epitaxial growth.

Thirteenth Embodiment

A thirteenth embodiment of the present invention is described below withreference to FIG. 24. A difference of the thirteenth embodiment from thepreceding embodiments is the structure of the cathode electrode 10.

FIG. 24 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according the thirteenthembodiment. FIG. 24 illustrates an example of the thirteenth embodimentobtained by modifying the structure of the cathode electrode 10 of theeighth embodiment shown in FIG. 19. The cathode electrode 10 of theother preceding embodiments can be modified in the same manner as shownin FIG. 24.

As shown in FIG. 24, according to the thirteenth embodiment, a trench 10a is formed in the buffer layer 5 in the epitaxial layer 1 f. Thecathode contact region 4 is formed on an inner surface of the trench 10a, and the cathode electrode 10 is formed on the cathode contact region4 so that the trench 10 a can be filled with the cathode contact region4 and the cathode electrode 10. Even in such a structure as shown inFIG. 24, the same effect as the eighth embodiment can be obtained.

Fourteenth Embodiment

A fourteenth embodiment of the present invention is described below withreference to FIG. 25. A difference of the fourteenth embodiment from thepreceding embodiments is the structure of the anode electrode 11.

FIG. 25 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according the fourteenthembodiment. FIG. 25 illustrates an example of the fourteenth embodimentobtained by modifying the structure of the anode electrode 11 of theeighth embodiment shown in FIG. 19. The anode electrode 11 of the otherpreceding embodiments can be modified in the same manner as shown inFIG. 25.

As shown in FIG. 25, according to the fourteenth embodiment, the anodeelectrode 11 is divided into two electrodes 11 a, 11 b. One electrode 11a is a Schottky electrode electrically connected to the low impurityconcentration portion 7, and the other electrode 11 b is an ohmicelectrode electrically connected to the high impurity concentrationportion 8. The Schottky electrode 11 a and the ohmic electrode 11 b areelectrically connected together through a wiring pattern formed in anupper layer such as an interlayer dielectric layer. Even in such astructure as shown in FIG. 25, the same effect as the eighth embodimentcan be obtained.

Fifteenth Embodiment

A fifteenth embodiment of the present invention is described below withreference to FIG. 26. A difference of the fifteenth embodiment from thepreceding embodiments is the structures of the cathode electrode 10 andthe anode electrode 11.

FIG. 26 is a diagram illustrating a cross-sectional view of asemiconductor device having a lateral diode according the fifteenthembodiment. FIG. 26 illustrates an example of the fifteenth embodimentobtained by modifying the structures of the cathode electrode 10 and theanode electrode 11 of the first embodiment. The cathode electrode 10 andthe anode electrode 11 of the other preceding embodiments can bemodified in the same manner as shown in FIG. 26.

As shown in FIG. 26, according to the fifteenth embodiment, the cathodeelectrode 10 has a barrier metal layer 10 b. The barrier metal layer 10b can be made of TiN, Tai, or TaN. When the cathode electrode 10 is madeof an electrode material, such as AlSi or AlSiCu, mainly containing Al,the cathode electrode 10 may be broken, for example, due tointerdiffusion between the electrode material and a semiconductormaterial (e.g., Si), of which the active layer 1 c is made. The barriermetal layer 10 b is located between the cathode electrode 10 and thecathode contact region 4 to protect the cathode electrode 10.

Likewise, the anode electrode 11 has a barrier metal layer 11 c. Thebarrier metal layer 11 c can be made of TiN, Tai, or TaN. The barriermetal layer 11 c is located between the anode electrode 11 and the anoderegion 6 to protect the anode electrode 11.

As described above, according to the fifteenth embodiment, the cathodeelectrode 10 has the barrier metal layer 10 b, and the anode electrode11 has the barrier metal layer 11 c. In such an approach, the cathodeelectrode 10 and the anode electrode 11 can be protected from damagecaused by the interdiffusion. Thus, reliability of the cathode electrode10 and the anode electrode 11 can be improved. Further, since thebarrier metal layer 11 c reduces the Schottky barrier height, Therefore,the amount of injected holes is reduced so that the reverse recoverycharge Qrr can be reduced.

The barrier metal layers 10 b, 11 c can be formed in the process shownin FIG. 8C. Specifically, a barrier material layer is formed on theinterlayer dielectric film, and then the conductor layer is formed onthe barrier material layer. Then, the barrier material layer and theconductor layer are patterned so that the barrier metal layers 10 b, 11c and the cathode electrode 10 and the anode electrode 11 can be formedat the same time.

(Modifications)

The embodiments described above can be modified in various ways, forexample, as follows.

In the above embodiments, the anode extension portion 9 is in contactwith the side surface of the trench isolation structure 1 d and locatedoutside the low impurity concentration portion 7 and the high impurityconcentration portion 8 with respect to the cathode contact region 4.Alternatively, the anode extension portion 9 can be separated from thetrench isolation structure 1 d, as long as the anode extension portion 9is located outside the low impurity concentration portion 7 and the highimpurity concentration portion 8 with respect to the cathode contactregion 4. A reason for this is discussed below with reference to FIGS.27A-27F and FIG. 28.

FIGS. 27A-27F are diagrams illustrating the semiconductor device inwhich the anode extension portion 9 is separated from the trenchisolation structure 1 d by 0 μm, 1.5 μm, 3.5 μm, 5.75 μm, 9.5 μm, and14.5 μm, respectively. FIG. 28 is a diagram illustrating a result of anexperiment conducted by the present inventors to measure a relationshipbetween the position (i.e., separation distance) of the anode extensionportion 9 from the trench isolation structure 1 d and the reverserecovery charge Qrr.

As shown in FIG. 28, the reverse recovery charge Qrr increases as theanode extension portion 9 approaches the cathode contact region 4. Fromthe standpoint of recovery loss, it is preferable that the reverserecovery charge Qrr be 120 nC or less. As can be seen from FIGS. 27A-27Cand FIG. 28, when the separation distance of the anode extension portion9 is 3.5 μm or less, it is ensured that the reverse recovery charge Qrrbe 120 nC or less. In FIGS. 27A-27C, the anode extension portion 9 islocated outside the low impurity concentration portion 7 and the highimpurity concentration portion 8 with respect to the cathode contactregion 4.

For the above reason, the anode extension portion 9 can be separatedfrom the trench isolation structure 1 d, as long as the anode extensionportion 9 is located outside the low impurity concentration portion 7and the high impurity concentration portion 8 with respect to thecathode contact region 4.

In the above embodiments, the anode electrode 11 is located almost allover the low impurity concentration portion 7 and the high impurityconcentration portion 8 exposed outside the LOCOS oxide layer 3.However, as long as the anode electrode 11 is in contact with each ofthe low impurity concentration portion 7 and the high impurityconcentration portion 8, there is no need that the anode electrode 11 islocated almost all over the low impurity concentration portion 7 and thehigh impurity concentration portion 8 exposed outside the LOCOS oxidelayer 3. That is, even when the sizes of the contact areas between theanode electrode 11 and each of the low impurity concentration portion 7and the high impurity concentration portion 8 are small, the recoveryloss can be reduced.

As shown in FIG. 29, an n-type impurity region 30 having an impurityconcentration greater than that of the cathode layer 2 can be interposedbetween the active layer 1 c and the BOX layer 1 b. In such an approach,voltage breakdown resistance can be improved. For example, when then-type impurity region 30 has a thickness of 4 μm and an n-type impurityconcentration of 1.25×10¹⁶cm⁻³, it is preferable that the n-typeimpurity concentration of the cathode layer 2 be about 1.0×10¹⁴cm⁻³, andthe p-type impurity concentration of the low impurity concentrationportion 7 be about 3.0×10¹⁶cm⁻³. In this case, it is preferable that then-type impurity concentration of the cathode contact region 4 be about6.0×10²⁰cm⁻³, and the n-type impurity concentration of the buffer layer5 be about 3.44×10¹⁷cm⁻³.

The n-type impurity region 30 can be formed by implanting n-typeimpurities into a surface of the silicon substrate for the active layer1 c, and then bonding the surface of the silicon substrate to thesupporting substrate 1 a through the BOX layer 1 b.

In the sixth embodiment, the straight portion of the high impurityconcentration portion 8 is located in the center of the low impurityconcentration portion 7 in the width direction of the low impurityconcentration portion 7, and the projections of the high impurityconcentration portion 8 extend from the straight portion and areconnected to the anode extension portion 9. Alternatively, the highimpurity concentration portion 8 can have no projections and bedisconnected from the anode extension portion 9. However, from thestandpoint of carrier drawing effect, it is preferable that the highimpurity concentration portion 8 be connected from the anode extensionportion 9.

In the above embodiments, the cathode contact region 4 is located allover the bottom surface of the cathode electrode 10. Alternatively asshown in FIGS. 30 and 31, the cathode contact region 4 can be in contactwith only a portion of the bottom surface of the cathode electrode 10.In an example shown FIG. 30, the cathode contact region 4 is in contactwith only a portion of the bottom surface of the cathode electrode 10,and the remaining portion of the bottom surface of the cathode electrode10 is in contact with the buffer layer 5. In an example shown in FIG.31, the cathode contact region 4 and a p⁺-type layer 50 are located onthe bottom surface of the cathode electrode 10 and alternately arrangedin a stripe manner so that the cathode electrode 10 can be electricallyconnected to the cathode contact region 4 and the p⁺-type layer 50. Forexample, the p⁺-type layer 50 can have a p-type impurity concentrationof 1.0×10²⁰cm⁻³ and a thickness of 0.55 μm.

As shown in FIG. 32 and FIGS. 33A and 33B, the high impurityconcentration portion 8 can be divided into first and second portions.FIG. 32 is a diagram corresponding to FIG. 2A and illustrating a partialenlarged top view of a semiconductor device having a lateral diodeaccording to a modification. FIG. 33A is a diagram illustrating across-sectional view taken along the line XXXIIIA-XXXIIIA in FIG. 32,and FIG. 33B is a diagram illustrating a cross-sectional view takenalong the line XXXIIIB-XXXIIIB in FIG. 32. Like the first embodiment,the first portion of the high impurity concentration portion 8 islocated in the low impurity concentration portion 7 at a positionfurthest away from the cathode contact region 4. Like the sixthembodiment, the second portion of the high impurity concentrationportion 8 is located in the center of the low impurity concentrationportion 7 in the width direction of the low impurity concentrationportion 7.

In the above embodiments, the high impurity concentration portion 8 issurrounded by the low impurity concentration portion 7. Alternatively,as shown in FIG. 34, the high impurity concentration portion 8 can belocated outside the low impurity concentration portion 7. In an exampleshown in FIG. 34, the high impurity concentration portion 8 is incontact with the low impurity concentration portion 7 and locatedfurther away from the cathode contact region 4 than the low impurityconcentration portion 7.

In the above embodiments, the anode extension portion 9 is a separatepiece of the anode region 6. Alternatively, as shown in FIG. 35, theanode extension portion 9 can be a single piece of the anode region 6.

That is, the anode region 6 can include the anode extension portion 9.In an example shown in FIG. 35, the low impurity concentration portion 7has a p-type impurity concentration of about 3.0×10¹⁶cm⁻³ and athickness of 15 μm, and extends from the surface of the active layer 1 cto the BOX layer 1 b. Even in such a structure as shown in FIG. 35, thesame effect as the above embodiments can be obtained.

Further, as shown in FIG. 36, the anode extension portion 9 can extendto below the anode region 6 so that at least a portion of the bottomsurface of the anode region 6 can be covered with the anode extensionportion 9. In an example shown in FIG. 36, the anode extension portion 9has a p-type impurity concentration of about 3.0×10¹⁶cm⁻³ and athickness of 15 μm, and extends to below the low impurity concentrationportion 7. Specifically, the anode extension portion 9 extends to aposition below the low impurity concentration portion 7 and closer tothe cathode contact region 4 than the high impurity concentrationportion 8. Even in such a structure as shown in FIG. 36, the same effectas the above embodiments can be obtained.

In the above embodiments, as shown in FIG. 7A, the anode extensionportion 9 is formed on the side surface of the trench isolationstructure 1 d by performing the oblique ion implantation. Alternatively,the anode extension portion 9 can be formed in a different process. Forexample, after a trench for the trench isolation structure 1 d isformed, p-doped polysilicon or p-doped oxide layer is formed in thetrench, and then solid-phase diffusion or vapor-phase diffusion isperformed by thermal treatment so that the anode extension portion 9 canbe formed on the side surface of the trench.

In the embodiments, the semiconductor device includes the IGBT alongwith the lateral diode. Alternatively, the semiconductor device caninclude other elements, such as a complementary metal-oxidesemiconductor (CMOS) and a laterally diffused metal oxide semiconductor(LDMOS), along with the lateral diode. As described previously withreference to FIGS. 7A-7C and FIGS. 8A-8C, since the lateral diode andthe IGBT are formed in the same process, the anode extension portion 9is formed in the IGBT area in addition to the diode area. Likewise, whenthe lateral diode and the other element are formed in the samesemiconductor substrate 1, the anode extension portion 9 is formed inthe other element area in addition to the diode area.

FIG. 37 is a diagram illustrating a cross-sectional view of asemiconductor device having a CMOS and a LDMOS along with the lateraldiode and the IGBT. The lateral diode, the IGBT, the CMOS, and the LDMOSare formed in the same semiconductor substrate 1. However, for ease ofunderstanding, the lateral diode and the IGBT are not shown in FIG. 37.

As shown in FIG. 37, the LDMOS and the CMOS are formed in thesemiconductor substrate 1, which is a SOI substrate. A LDMOS area, wherethe LDMOS is formed, is isolated by the trench isolation structure 1 dfrom a CMOS area, where the CMOS is formed. Thus, the LDMOS and the CMOSare isolated from each other. As shown in FIG. 7, the anode extensionportion 9 is formed in each of the CMOS area and the LDMOS area.

In the CMOS area, the LOCOS oxide layer 3 is formed on the surface ofthe active layer 1 c so that a P-channel MOSFET 60 and an N-channelMOSFET 61 can be isolated from each other. Specifically, an n-well layer62 a and a p-well layer 62 b formed in a surface portion of the activelayer 1 c are isolated by the LOCOS oxide layer 3.

In the P-channel MOSFET 60, a p⁺-type source region 63 a and a p⁺-typedrain region 64 a are formed in the n-well layer 62 a. A gate electrode66 a is formed through a gate insulation layer 65 a on a surface of then-well layer 62 a between the source region 63 a and the drain region 64a. A source electrode 67 a is formed on and electrically connected tothe source region 63 a, and a drain electrode 68 a is formed on andelectrically connected to the drain region 64 a.

In the N-channel MOSFET 61, an n⁺-type source region 63 b and an n⁺-typedrain region 64 b are formed in the p-well layer 62 b. A gate electrode66 b is formed through a gate insulation layer 65 b on a surface of thep-well layer 62 b between the source region 63 b and the drain region 64b. A source electrode 67 b is formed on and electrically connected tothe source region 63 b, and a drain electrode 68 b is formed on andelectrically connected to the drain region 64 b.

In this way, the CMOS having the P-channel MOSFET 60 and the N-channelMOSFET 61 is formed in the CMOS area.

In the LDMOS area, the LOCOS oxide layer 3 is formed on the surface ofthe active layer 1 c so that parts of a LDMOS 70 can be isolated. TheLDMOS 70 includes an n-type drain region 71, a p-type channel region 72,and an n⁺-type source region 73 that are formed in the surface portionof the active layer 1 c. An n⁺-type contact layer 74 is formed in asurface portion of the drain region 71. A p⁺-type contact layer 75 isformed in a surface portion of the channel region 72. The drain region71 and the channel region are isolated from each other by the LOCOSoxide layer 3. A gate electrode 78 is formed through a gate insulationlayer 77 on the channel region 72. A source electrode 79 is formed onthe source region 73 and the contact layer 75 and electrically connectedto the source region 73. A drain electrode 80 is formed on the contactlayer 74 and electrically connected to the drain region 71 through thecontact layer 74. Further, a p-type body layer 81 and a p-type deeplayer 82 are formed. The body layer 81 overlaps the channel region 72and extends deeper than the channel region 72. The deep layer 82 islocated outside the body layer 81. The body layer 81 and the deep layer82 increase the avalanche capability. In this way, the LDMOS 70 isformed in the LDMOS area.

As described above, the semiconductor device can include the CMOS andthe LDMOS along with the lateral diode. In this case, as shown in FIG.37, the anode extension portion 9 is formed on the side surface of thetrench isolation structure 1 d by which the CMOS area and the LSMOS areaare isolated.

In the above embodiment, the lateral diode is configured such that theanode is located on each side of the cathode. Alternatively, the lateraldiode can be configured such that the cathode is located on each side ofthe anode. That is, the conductivity-type can be reversed.

Specifically, in the embodiments, the n⁻-type cathode layer 2 is definedas a first semiconductor region, the p-type anode region 6 is defined asa second semiconductor region, the cathode electrode 10 is defined as afirst electrode electrically connected to the first semiconductorregion, and the anode electrode 11 is defined as a second electrodeelectrically connected to the second semiconductor region. The secondsemiconductor region has the low impurity concentration portion 7 andthe high impurity concentration portion 8, and the second electrode iselectrically connected to the low impurity concentration portion 7 andthe high impurity concentration portion 8 in such a manner that thesecond electrode forms an ohmic contact with the high impurityconcentration portion 8. Further, the second semiconductor region hasthe p⁺-type anode extension portion 9 extending in the depth directionof the semiconductor substrate 1 and having an impurity concentrationgreater than that of the low impurity concentration portion 7.

That is, in the embodiments, the first semiconductor region is ofn-type, and the second semiconductor region is of p-type. Alternatively,the first semiconductor region can be of p-type, and the secondsemiconductor region can be of n-type. Even when the conductivity-typeis reversed in this way, the same effect as the embodiments can beobtained. In each case, an electric potential is greater on thecathode-side than on the anode-side during ON-period of the IGBT, andthe electric potential is greater on the anode-side than on thecathode-side during OFF-period of the IGBT.

Such changes and modifications are to be understood as being within thescope of the present invention as defined by the appended claims.

1-6. (canceled)
 7. A semiconductor device having a lateral diode, thesemiconductor device comprising: a semiconductor substrate including afirst conductivity-type semiconductor layer; a first conductivity-typefirst semiconductor region located in the semiconductor layer; a firstconductivity-type contact region having an impurity concentrationgreater than an impurity concentration of the first semiconductorregion; a second conductivity-type second semiconductor region locatedin the semiconductor layer and separated from the contact region; afirst electrode electrically connected through the contact region to thefirst semiconductor region; and a second electrode electricallyconnected to the second semiconductor region, wherein one of the firstsemiconductor region and the second semiconductor region is a cathoderegion, the other of the first semiconductor region and the secondsemiconductor region is an anode region, one of the first electrode andthe second electrode is a cathode electrode of the lateral diode, theone of the first electrode and the second electrode being connected tothe cathode region, the other of the first electrode and the secondelectrode is an anode electrode of the lateral diode, the other of thefirst electrode and the second electrode being connected to the anoderegion, the second semiconductor region includes a low impurityconcentration portion, a high impurity concentration portion, and anextension portion, the low impurity concentration portion is in contactwith the high impurity concentration portion and has an impurityconcentration less than an impurity concentration of the high impurityconcentration portion, the second electrode forms an ohmic contact withthe high impurity concentration portion, the extension portion has animpurity concentration greater than the impurity concentration of thelow impurity concentration portion and extends in a thickness directionof the semiconductor layer, the contact region has a straight portion,the high impurity concentration portion has a straight portion on eachside of the contact region, the low impurity concentration portion has astraight portion on each side of the contact region, the extensionportion is located outside the low impurity concentration portion andthe high impurity concentration portion with respect to the contactregion, the straight portion of the high impurity concentration portionis located in the center of the low impurity concentration portion in awidth direction of the low impurity concentration portion, and the widthdirection of the low impurity concentration portion is perpendicular toa longitudinal direction of the contact region.
 8. The semiconductordevice according to claim 7, wherein the high impurity concentrationportion further has a projection extending perpendicularly from itsstraight portion and connected to the extension portion.
 9. Asemiconductor device having a lateral diode, the semiconductor devicecomprising: a semiconductor substrate including a firstconductivity-type semiconductor layer; a first conductivity-type firstsemiconductor region located in the semiconductor layer; a firstconductivity-type contact region having an impurity concentrationgreater than an impurity concentration of the first semiconductorregion; a second conductivity-type second semiconductor region locatedin the semiconductor layer and separated from the contact region; afirst electrode electrically connected through the contact region to thefirst semiconductor region; and a second electrode electricallyconnected to the second semiconductor region, wherein one of the firstsemiconductor region and the second semiconductor region is a cathoderegion, the other of the first semiconductor region and the secondsemiconductor region is an anode region, one of the first electrode andthe second electrode is a cathode electrode of the lateral diode, theone of the first electrode and the second electrode being connected tothe cathode region, the other of the first electrode and the secondelectrode is an anode electrode of the lateral diode, the other of thefirst electrode and the second electrode being connected to the anoderegion, the second semiconductor region includes a low impurityconcentration portion, a high impurity concentration portion, and anextension portion, the low impurity concentration portion is in contactwith the high impurity concentration portion and has an impurityconcentration less than an impurity concentration of the high impurityconcentration portion, the second electrode forms an ohmic contact withthe high impurity concentration portion, the extension portion has animpurity concentration greater than the impurity concentration of thelow impurity concentration portion and extends in a thickness directionof the semiconductor layer, the first semiconductor region has a trenchat a position corresponding to the first electrode, the contact regionis located on an inner surface of the trench, and the first electrode islocated in the trench in such a manner that the first electrode and thecontact region are electrically connected together inside the trench.10. A semiconductor device having a lateral diode, the semiconductordevice comprising: a semiconductor substrate including a firstconductivity-type semiconductor layer; a first conductivity-type firstsemiconductor region located in the semiconductor layer; a firstconductivity-type contact region having an impurity concentrationgreater than an impurity concentration of the first semiconductorregion; a second conductivity-type second semiconductor region locatedin the semiconductor layer and separated from the contact region; afirst electrode electrically connected through the contact region to thefirst semiconductor region; and a second electrode electricallyconnected to the second semiconductor region, wherein one of the firstsemiconductor region and the second semiconductor region is a cathoderegion, the other of the first semiconductor region and the secondsemiconductor region is an anode region, one of the first electrode andthe second electrode is a cathode electrode of the lateral diode, theone of the first electrode and the second electrode being connected tothe cathode region, the other of the first electrode and the secondelectrode is an anode electrode of the lateral diode, the other of thefirst electrode and the second electrode being connected to the anoderegion, the second semiconductor region includes a low impurityconcentration portion, a high impurity concentration portion, and anextension portion, the low impurity concentration portion is in contactwith the high impurity concentration portion and has an impurityconcentration less than an impurity concentration of the high impurityconcentration portion, the second electrode forms an ohmic contact withthe high impurity concentration portion, the extension portion has animpurity concentration greater than the impurity concentration of thelow impurity concentration portion and extends in a thickness directionof the semiconductor layer, the first electrode has a first barriermetal layer in contact with the contact region, and the second electrodehas a second barrier metal layer in contact with the secondsemiconductor region.
 11. (canceled)
 12. A semiconductor device having alateral diode, the semiconductor device comprising: a semiconductorsubstrate including a first conductivity-type semiconductor layer; afirst conductivity-type first semiconductor region located in thesemiconductor layer; a first conductivity-type contact region having animpurity concentration greater than an impurity concentration of thefirst semiconductor region; a second conductivity-type secondsemiconductor region located in the semiconductor layer and separatedfrom the contact region; a first electrode electrically connectedthrough the contact region to the first semiconductor region; and asecond electrode electrically connected to the second semiconductorregion, wherein one of the first semiconductor region and the secondsemiconductor region is a cathode region, the other of the firstsemiconductor region and the second semiconductor region is an anoderegion, one of the first electrode and the second electrode is a cathodeelectrode of the lateral diode, the one of the first electrode and thesecond electrode being connected to the cathode region, the other of thefirst electrode and the second electrode is an anode electrode of thelateral diode, the other of the first electrode and the second electrodebeing connected to the anode region, the second semiconductor regionincludes a low impurity concentration portion, a high impurityconcentration portion, and an extension portion, the low impurityconcentration portion is in contact with the high impurity concentrationportion and has an impurity concentration less than an impurityconcentration of the high impurity concentration portion, the secondelectrode forms an ohmic contact with the high impurity concentrationportion, the extension portion has an impurity concentration greaterthan the impurity concentration of the low impurity concentrationportion and extends in a thickness direction of the semiconductor layer,and the contact region is in contact with only a portion of a backsurface of the first electrode.
 13. The semiconductor device accordingto claim 12, further comprising: a second conductivity-type layerlocated below the first electrode, wherein the first electrode iselectrically connected to the contact region and the secondconductivity-type layer.